MANUFACTURING METHODS AND VACUUM OR HERMETICALLY PACKAGED MICROMACHINED OR MEMS DEVICES FORMED THEREBY HAVING SUBSTANTIALLY VERTICAL FEEDTHROUGHS

Details for Australian Patent Application No. 2003282964 (hide)

International Classifications

Event Publications

25 March 2004 Complete Application Filed

Priority application(s): 60/419,446 18.10.02 US

10 June 2004 Application Open to Public Inspection

Published as AU-A-2003282964

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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