METHOD TO RECOVER SPENT COMPONENTS OF A SPUTTER TARGET

Details for Australian Patent Application No. 2003282906 (hide)

Owner CABOT CORPORATION

Inventors MICHALUK, Christopher, A.; FORD, Robert, B.

Pub. Number AU-A-2003282906

PCT Number PCT/US2003/0311

PCT Pub. Number WO2004/033748

Priority 60/416,048 04.10.02 US

Filing date 2 October 2003

Wipo publication date 4 May 2004

International Classifications

C23C 014/00 Coating by vacuum evaporation, by sputtering or by ion implantation

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/416,048 04.10.02 US

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003282906

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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