A CORROSION RETARDING POLISHING SLURRY FOR THE CHEMICAL MECHANICAL POLISHING OF COPPER SURFACES

Details for Australian Patent Application No. 2003282852 (hide)

Owner PSILOQUEST, INC.

Inventors OBENG, Yaw, S.

Pub. Number AU-A-2003282852

PCT Number PCT/US2003/0326

PCT Pub. Number WO2004/037937

Priority 60/420,371 22.10.02 US

Filing date 14 October 2003

Wipo publication date 13 May 2004

International Classifications

C09G 001/02 Polishing compositions

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24D 013/14 Wheels having flexibly-acting working parts, e.g. buffing wheels

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/420,371 22.10.02 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003282852

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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