SIDEWALL SMOOTHING IN HIGH ASPECT RATIO/DEEP ETCHING USING A DISCREET GAS SWITCHING METHOD

Details for Australian Patent Application No. 2003282781 (hide)

Event Publications

25 March 2004 Complete Application Filed

Priority application(s): 60/403,891 16.08.02 US; 10/640,469 12.08.03 US

22 April 2004 Application Open to Public Inspection

Published as AU-A-2003282781

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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