A METHOD FOR PLASMA ETCHING PERFORMANCE ENHANCEMENT

Details for Australian Patent Application No. 2003282718 (hide)

Owner LAM RESEARCH CORPORATION

Inventors HUANG, Zhisong

Pub. Number AU-A-2003282718

PCT Number PCT/US2003/0317

PCT Pub. Number WO2004/034445

Priority 10/295,601 14.11.02 US; 10/674,675 29.09.03 US; 60/417,806 11.10.02 US

Filing date 6 October 2003

Wipo publication date 4 May 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 10/295,601 14.11.02 US; 10/674,675 29.09.03 US; 60/417,806 11.10.02 US

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003282718

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name LAM RESEARCH CORPORATION, Application No. 2003282718, under INID (71) correct the name to read LI, Lumin; SADJADI, Reza; LAM RESEARCH CORPORATION

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