METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Details for Australian Patent Application No. 2003282389 (hide)

Owner MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventors ARITA, Kiyoshi

Pub. Number AU-A-2003282389

PCT Number PCT/JP2003/0148

PCT Pub. Number WO2004/047165

Priority 2002-336415 20.11.02 JP; 2002-336416 20.11.02 JP

Filing date 20 November 2003

Wipo publication date 15 June 2004

International Classifications

H01L 021/78 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 2002-336415 20.11.02 JP; 2002-336416 20.11.02 JP

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2003282389

4 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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