DIFFUSER, WAVEFRONT SOURCE, WAVEFRONT SENSOR AND PROJECTION LIGHTING FACILITY

Details for Australian Patent Application No. 2003281995 (hide)

Owner CARL ZEISS SMT AG

Inventors SCHRIEVER, Martin; HAIDNER, Helmut

Pub. Number AU-A-2003281995

PCT Number PCT/EP2003/0087

PCT Pub. Number WO2004/090490

Priority 103 17 278.5 11.04.03 DE

Filing date 7 August 2003

Wipo publication date 1 November 2004

International Classifications

G01J 009/02 Measuring optical phase difference

G02B 005/32 Optical elements other than lenses - Holograms used as optical elements

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01M 011/02 Testing of optical apparatus - Testing of optical properties

G02B 005/02 Optical elements other than lenses - Diffusing elements

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 103 17 278.5 11.04.03 DE

2 December 2004 Application Open to Public Inspection

  Published as AU-A-2003281995

5 January 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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