METHOD AND APPARATUS FOR CONTROL OF LAYER THICKNESSES

Details for Australian Patent Application No. 2003281895 (hide)

Owner UNAXIS BALZERS AG

Inventors OU-YANG, Chieh

Pub. Number AU-A-2003281895

PCT Number PCT/CH2003/0007

PCT Pub. Number WO2004/050261

Priority 60/431,346 05.12.02 US

Filing date 2 December 2003

Wipo publication date 23 June 2004

International Classifications

B05C 001/08 Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating - using a roller

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 March 2004 Complete Application Filed

  Priority application(s): 60/431,346 05.12.02 US

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003281895

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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