DEVICE AND METHOD FOR COATING SUBSTRATES

Details for Australian Patent Application No. 2003281856 (hide)

Owner FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Inventors FRACH, Peter; BARTZSCH, Hagen; GOEDICKE, Klaus; WINKLER, Torsten; LIEBIG, Jorn-Steffen; KIRCHHOFF, Volker

Pub. Number AU-A-2003281856

PCT Number PCT/EP2003/0080

PCT Pub. Number WO2004/013374

Priority 102 34 859.6 31.07.02 DE

Filing date 22 July 2003

Wipo publication date 23 February 2004

International Classifications

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

Event Publications

18 March 2004 Complete Application Filed

  Priority application(s): 102 34 859.6 31.07.02 DE

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003281856

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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