METHOD AND APPARATUS FOR AUTOMATIC SENSOR INSTALLATION

Details for Australian Patent Application No. 2003281422 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors FUNK, Merritt; HARTMANN, Steven

Pub. Number AU-A-2003281422

PCT Number PCT/US2003/0190

PCT Pub. Number WO2004/006140

Priority 60/393,104 03.07.02 US

Filing date 18 June 2003

Wipo publication date 23 January 2004

International Classifications

G06F 017/50 Digital computing or data processing equipment or methods, specially adapted for specific functions - Computer-aided design

Event Publications

4 March 2004 Complete Application Filed

  Priority application(s): 60/393,104 03.07.02 US

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003281422

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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