SHEARING INTERFEROMETER CALIBRATING METHOD, PRODUCTION METHOD FOR PROJECTION OPTICAL SYSTEM, PROJECTION OPTICALSYSTEM, AND PROJECTION EXPOSURE SYSTEM

Details for Australian Patent Application No. 2003281312 (hide)

Owner NIKON CORPORATION

Inventors LIU, Zhigiang; SUGISAKI, Katsumi; OTA, Kazuya

Pub. Number AU-A-2003281312

PCT Number PCT/JP2003/0085

PCT Pub. Number WO2004/005846

Priority 2002-198901 08.07.02 JP

Filing date 7 July 2003

Wipo publication date 23 January 2004

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

4 March 2004 Complete Application Filed

  Priority application(s): 2002-198901 08.07.02 JP

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003281312

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003281313-FIBER PROCESSING AGENT AND FIBER PROCESSED WITH THE FIBER PROCESSING AGENT

2003281311-FLUORESCENT PROBE