FILM FORMING APPARATUS

Details for Australian Patent Application No. 2003280994 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors YAMASAKI, Hideaki; KAWANO, Yumiko; YAMAMOTO, Norihiko

Pub. Number AU-A-2003280994

PCT Number PCT/JP2003/0088

PCT Pub. Number WO2004/007797

Priority 2002-201533 10.07.02 JP

Filing date 10 July 2003

Wipo publication date 2 February 2004

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

4 March 2004 Complete Application Filed

  Priority application(s): 2002-201533 10.07.02 JP

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003280994

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003280995-PROCESS FOR PRODUCING OPTICALLY ACTIVE Beta-AMINONITRILE COMPOUND AND AMIDE COMPOUND AS ANTIPODE THEREOF

2003280993-HUMAN PROTHROMBIN ANALOG AND HUMAN MEIZOTHROMBIN ANALOG