SYSTEM AND METHOD FOR SUPPRESSION OF WAFER TEMPERATURE DRIFT IN COLD-WELL CVD SYSTEM
Details for Australian Patent Application No. 2003280184 (hide)
International Classifications
Event Publications
26 February 2004 Complete Application Filed
Priority application(s): 60/431,841 09.12.02 US
5 August 2004 Application Open to Public Inspection
Published as AU-A-2003280184
25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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