SYSTEM AND METHOD FOR SUPPRESSION OF WAFER TEMPERATURE DRIFT IN COLD-WELL CVD SYSTEM

Details for Australian Patent Application No. 2003280184 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors DE BOER, Wiebe

Pub. Number AU-A-2003280184

PCT Number PCT/IB03/05447

PCT Pub. Number WO2004/053946

Priority 60/431,841 09.12.02 US

Filing date 26 November 2003

Wipo publication date 30 June 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 60/431,841 09.12.02 US

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003280184

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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