METHODS FOR FORMING COATINGS ON MEMS DEVICES

Details for Australian Patent Application No. 2003279941 (hide)

Owner REGENTS OF THE UNIVERSITY OF MINNESOTA

Inventors JUN, Yongseok; YAN, Hongwei; ZHU, Xioyang

Pub. Number AU-A-2003279941

PCT Number PCT/US03/32250

PCT Pub. Number WO2004/033364

Priority 10/269,682 11.10.02 US

Filing date 10 October 2003

Wipo publication date 4 May 2004

International Classifications

B81B 007/00 Micro-structural systems

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/269,682 11.10.02 US

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003279941

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name REGENTS OF THE UNIVERSITY OF MINNESOTA, Application No. 2003279941, under INID (71) correct the name to read MICROSURFACES, INC.; REGENTS OF THE UNIVERSITY OF MINNESOTA

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