METHODS AND SYSTEMS FOR PROCESS MONITORING USING X-RAY EMISSION

Details for Australian Patent Application No. 2003279904 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD.

Inventors SHEMESH, Dror

Pub. Number AU-A-2003279904

PCT Number PCT/US03/32037

PCT Pub. Number WO2004/034044

Priority 60/417,273 08.10.02 US

Filing date 8 October 2003

Wipo publication date 4 May 2004

International Classifications

G01N 023/225 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 60/417,273 08.10.02 US

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003279904

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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