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Details for Australian Patent Application No. 2003279839 (hide)

Owner APPLIED MATERIALS, INC.

Inventors XIA, Li-Qun; ZHENG, Yi; NEMANI, Srinivas, D.

Pub. Number AU-A-2003279839

PCT Number PCT/US03/31559

PCT Pub. Number WO2004/033752

Priority 10/266,551 07.10.02 US

Filing date 7 October 2003

Wipo publication date 4 May 2004

International Classifications

C23C 016/32 Chemical deposition or plating by decomposition - Carbides

C23C 016/02 Chemical deposition or plating by decomposition - Pretreatment of the material to be coated

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/266,551 07.10.02 US

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003279839

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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