VERTICAL SPLIT GATE NONVOLATILE MEMORY CELL AND METHOD OF FABRICATION THEREOF

Details for Australian Patent Application No. 2003279478 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors VAN SCHAIJK, Robertus, T., F.; VAN DUUREN, Michiel, J.

Pub. Number AU-A-2003279478

PCT Number PCT/IB03/05502

PCT Pub. Number WO2004/057661

Priority 02080428.2 19.12.02 EP

Filing date 27 November 2003

Wipo publication date 14 July 2004

International Classifications

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/115 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - Electrically programmable read-only memories

H01L 021/8247 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 02080428.2 19.12.02 EP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003279478

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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