RELIABLE LOW-K INTERCONNECT STRUCTURE WITH HYBRID DIELECTRIC

Details for Australian Patent Application No. 2003279460 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors HICHRI, Habib; STANDAERT, Theordorus; BIERY, Glenn; FITZSIMMONS, John; GRECO, Stephen; LEE, Jia; GATES, Stephen; SPOONER, Terry; ANGYAL, Matthew

Pub. Number AU-A-2003279460

PCT Number PCT/GB03/04814

PCT Pub. Number WO2004/044978

Priority 10/294,139 14.11.02 US

Filing date 7 November 2003

Wipo publication date 3 June 2004

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/532 Details of semiconductor or other solid state devices

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/294,139 14.11.02 US

8 July 2004 Application Open to Public Inspection

  Published as AU-A-2003279460

28 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003279461-DISORDERS OF LIPID METABOLISM

2003279459-ELECTRONIC CONTROL APPARATUS FOR A VEHICLE