HIGH TEMPERATURE, HIGH STRENGTH, COLORABLE MATERIALS FOR DEVICE PROCESSING SYSTEMS

Details for Australian Patent Application No. 2003279239 (hide)

Owner ENTEGRIS, INC.

Inventors BUCHA, Robert; EXTRAND, Charles, W.

Pub. Number AU-A-2003279239

PCT Number PCT/US03/32197

PCT Pub. Number WO2004/033103

Priority 60/417,150 09.10.02 US

Filing date 9 October 2003

Wipo publication date 4 May 2004

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 60/417,150 09.10.02 US

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003279239

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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