SYSTEM AND METHOD FOR FABRICATION AND REPLICATION OF DIFFRACTIVE OPTICAL ELEMENTS FOR MASKLESS LITHOGRAPHY

Details for Australian Patent Application No. 2003279127 (hide)

Owner MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventors MENON, Rajesh; CARTER, David, J.; SMITH, Henry, I.; GIL, Dario; HASTINGS, Jeffrey, T.; GOODBERLET, James, G.

Pub. Number AU-A-2003279127

PCT Number PCT/US03/31367

PCT Pub. Number WO2004/031861

Priority 60/415,720 03.10.02 US

Filing date 2 October 2003

Wipo publication date 23 April 2004

International Classifications

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 60/415,720 03.10.02 US

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003279127

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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