METHOD AND APPARATUS OF PLASMA-ENHANCED COAXIAL MAGNETRON FOR SPUTTER-COATING INTERIOR SURFACES

Details for Australian Patent Application No. 2003279032 (hide)

Owner HRL LABORATORIES, LLC

Inventors WEI, Ronghua

Pub. Number AU-A-2003279032

PCT Number PCT/US03/30604

PCT Pub. Number WO2004/030021

Priority 10/256,151 25.09.02 US

Filing date 25 September 2003

Wipo publication date 19 April 2004

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/256,151 25.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003279032

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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