METHOD FOR FORMING A SEMICONDUCTOR DEVICE AND STRUCTURE THEREOF

Details for Australian Patent Application No. 2003279030 (hide)

Owner MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventors GOLDBERG, Cindy, K.; FILIPIAK, Stanley, M.; FLAKE, John, C.; LII, Yeong-Jyh, T.; SMITH, Bradley, P.; SOLOMENTSEV, Yuri, E.; SPARKS, Terry, G.; STROZEWSKI, Kirk, J.; YU, Kathleen, C.

Pub. Number AU-A-2003279030

PCT Number PCT/US03/30590

PCT Pub. Number WO2004/061948

Priority 10/327,403 20.12.02 US

Filing date 23 September 2003

Wipo publication date 29 July 2004

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/327,403 20.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003279030

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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