FLUORINATED SURFACTANTS FOR AQUEOUS ACID ETCH SOLUTIONS

Details for Australian Patent Application No. 2003278831 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors MOORE, George, G., I.; PARENT, Michael J.; SAVU, Patricia M.; FLYNN, Richard M.; ZHANG, Zhongxing; LAMANNA, William M.; QIU, Zai-Ming

Pub. Number AU-A-2003278831

PCT Number PCT/US03/29262

PCT Pub. Number WO2004/044092

Priority 10/290,763 08.11.02 US

Filing date 17 September 2003

Wipo publication date 3 June 2004

International Classifications

C09K 013/04 Etching, surface-brightening or pickling compositions

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C09K 013/08 Etching, surface-brightening or pickling compositions

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/290,763 08.11.02 US

8 July 2004 Application Open to Public Inspection

  Published as AU-A-2003278831

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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