METHOD USING SILICIDE CONTACTS FOR SEMICONDUCTOR PROCESSING

Details for Australian Patent Application No. 2003278824 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors BESSER, Paul, R.; CHAN, Simon, S.; BROWN, David, E.; PATON, Eric, N.

Pub. Number AU-A-2003278824

PCT Number PCT/US2003/0175

PCT Pub. Number WO2004/001826

Priority 10/180,858 25.06.02 US

Filing date 4 June 2003

Wipo publication date 6 January 2004

International Classifications

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 10/180,858 25.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003278824

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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