SYSTEM OF TRANSPORTING AND STORING CONTAINERS OF SEMICONDUCTOR WAFERS AND TRANSFER MECHANISM

Details for Australian Patent Application No. 2003278268 (hide)

Owner RECIF

Inventors POLI, Bernard; GAUDON, Bernard; LERO, Christophe; HADDAD, Florent

Pub. Number AU-A-2003278268

PCT Number PCT/FR03/02652

PCT Pub. Number WO2004/023530

Priority 02/11049 06.09.02 FR

Filing date 5 September 2003

Wipo publication date 29 March 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 02/11049 06.09.02 FR

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2003278268

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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