METHOD OF PRODUCING A HIGH DENSITY PATTERN OF ISOLATED CLUSTERS

Details for Australian Patent Application No. 2003278021 (hide)

Owner LA CORPORATION DE L'ECOLE POLYTECHNIQUE DE MONTREAL

Inventors SACHER, Edward; PIYAKIS, Konstantinos; YANG, De-Quan

Pub. Number AU-A-2003278021

PCT Number PCT/CA03/01581

PCT Pub. Number WO2004/035855

Priority 60/419,109 18.10.02 US

Filing date 17 October 2003

Wipo publication date 4 May 2004

International Classifications

C23C 014/02 Coating by vacuum evaporation, by sputtering or by ion implantation - Pretreatment of the material to be coated

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 60/419,109 18.10.02 US

10 June 2004 Application Open to Public Inspection

  Published as AU-A-2003278021

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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