ILLUMINATION SYSTEM FOR A WAVELENGTH = 193 NM, COMPRISING SENSORS FOR DETERMINING THE ILLUMINATION

Details for Australian Patent Application No. 2003277893 (hide)

Event Publications

26 February 2004 Complete Application Filed

Priority application(s): 102 45 625.9 30.09.02 DE; 103 37 766.2 14.08.03 DE

27 May 2004 Application Open to Public Inspection

Published as AU-A-2003277893

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

Applications OPI - Name Index Under the name CARL ZEISS SMT AG, Application No. 2003277893, under INID (71) correct the name to read ASML Netherlands B.V.; CARL ZEISS SMT AG

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.