APPARATUS FOR VACUUM TREATING TWO DIMENSIONALLY EXTENDED SUBSTRATES AND METHOD FOR MANUFACTURING SUCH SUBSTRATES

Details for Australian Patent Application No. 2003277790 (hide)

Owner UNAXIS BALZERS AG

Inventors OSTERMANN, Rainer; BUECHEL, Arthur; ELYAAKOUBI, Mustapha

Pub. Number AU-A-2003277790

PCT Number PCT/CH03/00742

PCT Pub. Number WO2004/046416

Priority 60/426,697 15.11.02 US

Filing date 12 November 2003

Wipo publication date 15 June 2004

International Classifications

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

Event Publications

26 February 2004 Complete Application Filed

  Priority application(s): 60/426,697 15.11.02 US

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2003277790

4 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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