METHOD OF FORMING FILM ON SUBSTRATE

Details for Australian Patent Application No. 2003277601 (hide)

Owner NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventors SAKAI, Shigeki

Pub. Number AU-A-2003277601

PCT Number PCT/JP03/14188

PCT Pub. Number WO2004/042110

Priority 2002-325000 08.11.02 JP

Filing date 7 November 2003

Wipo publication date 7 June 2004

International Classifications

C23C 014/28 Coating by vacuum evaporation, by sputtering or by ion implantation - by wave energy or particle radiation

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 2002-325000 08.11.02 JP

1 July 2004 Application Open to Public Inspection

  Published as AU-A-2003277601

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003277602-SETTLEMENT SERVER

2003277600-METHOD FOR QUICK DIAGNOSIS OF KIDNEY DISEASES