INSULATION FILM FORMATION DEVICE

Details for Australian Patent Application No. 2003277594 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors NISHIBAYASHI, Takahiro

Pub. Number AU-A-2003277594

PCT Number PCT/JP03/14176

PCT Pub. Number WO2004/047161

Priority 2002-333927 18.11.02 JP; 2002-333928 18.11.02 JP

Filing date 7 November 2003

Wipo publication date 15 June 2004

International Classifications

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B05C 011/10 Component parts, details or accessories not specifically provided for in groups - Storage, supply or control of liquid or other fluent material

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 2002-333927 18.11.02 JP; 2002-333928 18.11.02 JP

15 July 2004 Application Open to Public Inspection

  Published as AU-A-2003277594

4 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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