SILICON OXIDE SINTERED PRODUCT FOR SPUTTERING TARGET

Details for Australian Patent Application No. 2003277586 (hide)

Owner SUMITOMO TITANIUM CORPORATION

Inventors NATSUME, Yoshitake

Pub. Number AU-A-2003277586

PCT Number PCT/JP03/14167

PCT Pub. Number WO2004/048289

Priority 2002-344262 27.11.02 JP

Filing date 6 November 2003

Wipo publication date 18 June 2004

International Classifications

C04B 035/01 Shaped ceramic products characterised by their composition - based on oxides

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C04B 035/14 Shaped ceramic products characterised by their composition - based on silica

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 2002-344262 27.11.02 JP

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2003277586

11 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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