RESIST COMPOSITION

Details for Australian Patent Application No. 2003277581 (hide)

Owner ASAHI GLASS COMPANY, LIMITED

Inventors KAWAGUCHI, Yasuhide; KANEKO, Isamu; TAKEBE, Yoko; OKADA, Shinji; YOKOKOJI, Osamu

Pub. Number AU-A-2003277581

PCT Number PCT/JP03/14158

PCT Pub. Number WO2004/042475

Priority 2002-323825 07.11.02 JP

Filing date 6 November 2003

Wipo publication date 7 June 2004

International Classifications

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C08F 016/02 Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal, or ketal radical

C08F 016/24 Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal, or ketal radical

C08F 008/02 Chemical modification by after-treatment

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 2002-323825 07.11.02 JP

1 July 2004 Application Open to Public Inspection

  Published as AU-A-2003277581

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003277582-FLUOROPOLYMER

2003277580-SPUN BONDED NONWOVEN FABRIC, LAMINATES MADE BY USING THE SAME, AND PROCESSES FOR PRODUCTION OF BOTH