METHOD OF CLEANING ION SOURCE, AND CORRESPONDING APPARATUS/SYSTEM

Details for Australian Patent Application No. 2003277443 (hide)

Owner GUARDIAN INDUSTRIES CORP. ADVANCED ENERGY INDUSTRIES, INC.

Inventors LUTEN, Henry, A.; FRATI, Maximo; ADVANCED ENERGY INDUSTRIES, INC.; SHAW, Denise, R.; VEERASAMY, Vijayen, S.

Pub. Number AU-A-2003277443

PCT Number PCT/US03/33095

PCT Pub. Number WO2004/038754

Priority 10/419,990 22.04.03 US; 60/419,519 21.10.02 US

Filing date 20 October 2003

Wipo publication date 13 May 2004

International Classifications

H01J 027/02 Ion beam tubes - Ion sources

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 10/419,990 22.04.03 US; 60/419,519 21.10.02 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003277443

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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