APPARATUS AND METHOD FOR DEPOSITING AN OXIDE FILM

Details for Australian Patent Application No. 2003277330 (hide)

Owner APPLIED MATERIALS, INC.

Inventors RILEY, Norma, B.; ANDERSON, Roger, N.; COMITA, Paul, B.; WALDHAUER, Ann

Pub. Number AU-A-2003277330

PCT Number PCT/US03/32038

PCT Pub. Number WO2004/035859

Priority 10/273,830 17.10.02 US

Filing date 8 October 2003

Wipo publication date 4 May 2004

International Classifications

C23C 016/40 Chemical deposition or plating by decomposition - Oxides

C23C 016/52 Chemical deposition or plating by decomposition - Controlling or regulating the coating process

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 10/273,830 17.10.02 US

10 June 2004 Application Open to Public Inspection

  Published as AU-A-2003277330

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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