SYSTEM FOR SUBSTRATE PROCESSING WITH MENISCUS, VACUUM, IPA VAPOR, DRYING MANIFOLD

Details for Australian Patent Application No. 2003277185 (hide)

International Classifications

Event Publications

19 February 2004 Complete Application Filed

Priority application(s): 10/261,839 30.09.02 US; 10/330,843 24.12.02 US; 10/330,897 24.12.02 US; 10/404,270 31.03.03 US

20 May 2004 Application Open to Public Inspection

Published as AU-A-2003277185

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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