METHODS AND SYSTEMS FOR PROCESSING A SUBSTRATE USING A DYNAMIC LIQUID MENISCUS

Details for Australian Patent Application No. 2003277052 (hide)

Event Publications

19 February 2004 Complete Application Filed

Priority application(s): 10/261,839 30.09.02 US; 10/330,843 24.12.02 US; 10/330,897 24.12.02 US; 10/404,692 31.03.03 US; 10/603,427 24.06.03 US

27 May 2004 Application Open to Public Inspection

Published as AU-A-2003277052

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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