BUILT-IN SELF TEST OF MEMS

Details for Australian Patent Application No. 2003276913 (hide)

Owner CARNEGIE MELLON UNIVERSITY

Inventors BLANTON, Ronald, DeShawn; DEB, Nilmoni

Pub. Number AU-A-2003276913

PCT Number PCT/US03/29920

PCT Pub. Number WO2004/027435

Priority 60/411,703 18.09.02 US

Filing date 18 September 2003

Wipo publication date 8 April 2004

International Classifications

G01P 021/00 Testing or calibrating of apparatus or devices covered by the other groups of this subclass

G01P 015/125 Measuring acceleration - by capacitive pick-up

B81C 005/00

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 60/411,703 18.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003276913

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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