CHARGED PARTICLE BEAM SYSTEM

Details for Australian Patent Application No. 2003276900 (hide)

Owner FEI COMPANY

Inventors STEWART, Diane, K.; KNOWLES, Ralph, W.; KIMBALL, Brian, T.

Pub. Number AU-A-2003276900

PCT Number PCT/US03/29447

PCT Pub. Number WO2004/027809

Priority 60/411,699 18.09.02 US; 10/330,691 27.12.02 US

Filing date 18 September 2003

Wipo publication date 8 April 2004

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 60/411,699 18.09.02 US; 10/330,691 27.12.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003276900

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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