A METHOD AND APPARATUS FOR THE COMPENSATION OF EDGE RING WEAR IN A PLASMA PROCESSING CHAMBER

Details for Australian Patent Application No. 2003276895 (hide)

Owner LAM RESEARCH CORPORATION

Inventors STEGER, Robert, J.

Pub. Number AU-A-2003276895

PCT Number PCT/US03/29309

PCT Pub. Number WO2004/027816

Priority 10/247,812 18.09.02 US

Filing date 16 September 2003

Wipo publication date 8 April 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 10/247,812 18.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003276895

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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