INTERFEROMETRIC OPTICAL SYSTEM AND METHODS PROVIDING SIMULTANEOUSLY SCANNED OPTICAL PATH LENGTH AND FOCUS

Details for Australian Patent Application No. 2003276755 (hide)

Owner ZYGO CORPORATION

Inventors DE GROOT, Peter; DE LEGA COLONNA, Xavier; BALASUBRAMANIAM, Senthil

Pub. Number AU-A-2003276755

PCT Number PCT/US03/19231

PCT Pub. Number WO2003/106921

Priority 60/389,762 17.06.02 US

Filing date 17 June 2003

Wipo publication date 31 December 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

G01B 011/24 Measuring arrangements characterised by the use of optical means - for measuring contours or curvatures

G01N 021/47 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Scattering, i.e. diffuse reflection

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 60/389,762 17.06.02 US

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2003276755

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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