METHOD AND APPARATUS FOR THICKNESS DECOMPOSITION OF COMPLICATED LAYER STRUCTURES

Details for Australian Patent Application No. 2003276649 (hide)

Owner TEVET PROCESS CONTROL TECHNOLOGIES LTD.

Inventors DU-NOUR, Ofer; RUBINSTEIN, Vladimir

Pub. Number AU-A-2003276649

PCT Number PCT/IL03/00888

PCT Pub. Number WO2004/038321

Priority 10/281,207 28.10.02 US

Filing date 28 October 2003

Wipo publication date 13 May 2004

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 10/281,207 28.10.02 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003276649

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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