MICRO-STRUCTURE COOLING DEVICE AND USE THEREOF

Details for Australian Patent Application No. 2003276003 (hide)

Owner ATOTECH DEUTSCHLAND GMBH

Inventors THEISEN, Sven; HOHN, Markus; MEYER, Heinrich; CRAMER, Konrad; KURTZ, Olaf; HERBER, Ralph; PRECHTL, Peter

Pub. Number AU-A-2003276003

PCT Number PCT/EP03/10800

PCT Pub. Number WO2004/032231

Priority 102 46 990.3 02.10.02 DE

Filing date 29 September 2003

Wipo publication date 23 April 2004

International Classifications

H01L 023/473 Details of semiconductor or other solid state devices

Event Publications

19 February 2004 Complete Application Filed

  Priority application(s): 102 46 990.3 02.10.02 DE

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003276003

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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