SUBSTRATE WASHING APPARATUS

Details for Australian Patent Application No. 2003275563 (hide)

Owner YAMAMOTO, Yoshiharu

Inventors YAMAMOTO, Yoshiharu

Pub. Number AU-A-2003275563

PCT Number PCT/JP03/13351

PCT Pub. Number WO2005/038893

Filing date 20 October 2003

Wipo publication date 5 May 2005

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 003/02 Cleaning by methods involving the use or presence of liquid or steam - Cleaning by the force of jets or sprays

Event Publications

12 February 2004 Complete Application Filed

23 June 2005 Application Open to Public Inspection

  Published as AU-A-2003275563

6 July 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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