METHOD OF PRODUCING A MICROSYSTEM STRUCTURE WITH LATERAL GAPS AND CORRESPONDING MICROSYSTEM STRUCTURE

Details for Australian Patent Application No. 2003273133 (hide)

Owner CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)

Inventors COLLARD, Dominique; KAISER, Andreas; QUEVY, Emmanuel; BUCHAILLOT, Lionel

Pub. Number AU-A-2003273133

PCT Number PCT/FR03/01165

PCT Pub. Number WO2003/100969

Priority 02/06388 24.05.02 FR

Filing date 11 April 2003

Wipo publication date 12 December 2003

International Classifications

H03H 003/007 Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators

H03H 009/46 Networks comprising electromechanical or electro-acoustic elements

H03H 009/24 Networks comprising electromechanical or electro-acoustic elements

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Event Publications

29 January 2004 Complete Application Filed

  Priority application(s): 02/06388 24.05.02 FR

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003273133

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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