PROBE MARK READER AND PROBE MARK READING METHOD

Details for Australian Patent Application No. 2003273025 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors KOMATSU, Shigekazu; CHAYA, Hiromi; HAYASHI, Takahisa

Pub. Number AU-A-2003273025

PCT Number PCT/JP03/13256

PCT Pub. Number WO2004/038786

Priority 2002-312579 28.10.02 JP; 2003-194541 09.07.03 JP

Filing date 16 October 2003

Wipo publication date 13 May 2004

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 2002-312579 28.10.02 JP; 2003-194541 09.07.03 JP

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003273025

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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