PLASMA PROCESSING APPARATUS, PROCESSING VESSEL USED IN PLASMA PROCESSING APPARATUS, DIELECTRIC PLATE USED IN PLASMA PROCESSING APPARATUS

Details for Australian Patent Application No. 2003272975 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MORITA, Osamu

Pub. Number AU-A-2003272975

PCT Number PCT/JP03/13051

PCT Pub. Number WO2004/034455

Priority 2002-297689 10.10.02 JP

Filing date 10 October 2003

Wipo publication date 4 May 2004

International Classifications

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H05H 001/46 Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

C23C 016/511 Chemical deposition or plating by decomposition

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 2002-297689 10.10.02 JP

3 June 2004 Application Open to Public Inspection

  Published as AU-A-2003272975

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003272976-DISPOSABLE DIAPER

2003272974-ANTI-INFLUENZA VIRUS AGENT