METHOD FOR FORMING THIN FILM, APPARATUS FOR FORMING THIN FILM, AND METHOD FOR MONITORING THIN FILM FORMING PROCESS

Details for Australian Patent Application No. 2003272894 (hide)

Owner TOPPAN PRINTING CO., LTD.

Inventors KASHIMA, Hiroto; TSUJINO, Manabu; KAKEMURA, Toshiaki

Pub. Number AU-A-2003272894

PCT Number PCT/JP03/12334

PCT Pub. Number WO2004/031440

Priority 2002-287847 30.09.02 JP; 2003-282653 30.07.03 JP

Filing date 26 September 2003

Wipo publication date 23 April 2004

International Classifications

C23C 016/505 Chemical deposition or plating by decomposition

C23C 016/52 Chemical deposition or plating by decomposition - Controlling or regulating the coating process

C23C 016/42 Chemical deposition or plating by decomposition - Silicides

C08J 007/06 Chemical treatment or coating of shaped articles made of macromolecular substances

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 2002-287847 30.09.02 JP; 2003-282653 30.07.03 JP

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003272894

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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