RUTHENIUM COMPOUND AND PROCESS FOR PRODUCING METALLIC RUTHENIUM FILM

Details for Australian Patent Application No. 2003272881 (hide)

Owner JSR CORPORATION

Inventors SAKAI, Tatsuya; OKADA, Sachiko; MATSUKI, Yasuo

Pub. Number AU-A-2003272881

PCT Number PCT/JP03/11848

PCT Pub. Number WO2004/050947

Priority 2002-350951 03.12.02 JP; 2003-282385 30.07.03 JP

Filing date 17 September 2003

Wipo publication date 23 June 2004

International Classifications

C23C 016/18 Chemical deposition or plating by decomposition - from metallo-organic compounds

C07C 011/12 Acyclic unsaturated hydrocarbons

C07C 013/263 Cyclic hydrocarbons containing rings other than, or in addition to, six-membered aromatic rings

C07C 053/124 Saturated compounds having only one carboxyl group bound to an acyclic carbon atom or hydrogen

C07C 053/18 Saturated compounds having only one carboxyl group bound to an acyclic carbon atom or hydrogen

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 2002-350951 03.12.02 JP; 2003-282385 30.07.03 JP

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003272881

18 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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