POLISHING PAD FOR PLANARIZATION

Details for Australian Patent Application No. 2003272674 (hide)

Owner PPG INDUSTRIES OHIO, INC.

Inventors ALLISON, William, C.; SWISHER, Robert; WANG, Alan, E.

Pub. Number AU-A-2003272674

PCT Number PCT/US03/30140

PCT Pub. Number WO2004/028745

Priority 60/413,366 25.09.02 US

Filing date 18 September 2003

Wipo publication date 19 April 2004

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24D 013/12 Wheels having flexibly-acting working parts, e.g. buffing wheels

B24D 013/14 Wheels having flexibly-acting working parts, e.g. buffing wheels

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 60/413,366 25.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003272674

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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