LOAD LOCK VACUUM CONDUCTANCE LIMITING APERTURE

Details for Australian Patent Application No. 2003272655 (hide)

Owner VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

Inventors EVANS, Morgan, D.

Pub. Number AU-A-2003272655

PCT Number PCT/US03/29972

PCT Pub. Number WO2004/030017

Priority 10/254,229 25.09.02 US

Filing date 24 September 2003

Wipo publication date 19 April 2004

International Classifications

H01J 037/18 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 10/254,229 25.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003272655

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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